Micro- and Nanomechanics

It has been known for quite some time that materials and structures with small-scale dimensions do not behave in the same manner as their bulk counterparts. This aspect was first observed in thin films where certain defect structures were found to have deleterious effects on the film’s structural integrity and reliability. This became a significant concern because thin films are routinely employed as components in microelectronics and microelectromechanical systems (MEMS). Their properties frequently allow essential device functions and therefore accurate identification of these properties is key to the development of new technologies. Unfortunately, most of our knowledge is based on bulk material behavior, which many times fails to describe material response in small-scale dimensions because of the dominance of surface and interface effects, finite number